Measurement Techniques for Thin Films PDF Download

Author: Bertram Schwartz
Publisher:
ISBN:
Category : Metallic films
Languages : en
Pages : 376

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Author: Bertram Schwartz
Publisher:
ISBN: 9780384543607
Category :
Languages : en
Pages :

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Book Description

Author: Michael Quinten
Publisher: John Wiley & Sons
ISBN: 3527664351
Category : Science
Languages : en
Pages : 212

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Book Description
A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromagnetic radiation in space and matter. The main topic of this book, the determination of the thickness of a layer in a layer stack by measuring the spectral reflectance or transmittance, is treated in the following three chapters. The color of thin layers is discussed in chapter 6. Finally, in chapter 7, the author discusses several industrial applications of the layer thickness measurement, including high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, transparent conductive films, oxides and polymers, thin film photovoltaics, and heavily doped silicon. Aimed at industrial and academic researchers, engineers, developers and manufacturers involved in all areas of optical layer and thin optical film measurement and metrology, process control, real-time monitoring, and applications.

Author: Harland G. Tompkins
Publisher: Momentum Press
ISBN: 1606507281
Category : Technology & Engineering
Languages : en
Pages : 138

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Book Description
Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.

Author: Bertram Schwartz
Publisher:
ISBN: 9780384543607
Category :
Languages : en
Pages :

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Author: William Davison
Publisher: Cambridge University Press
ISBN: 110713076X
Category : Science
Languages : en
Pages : 321

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An essential guide to the applications and usage of the diffusive gradients in thin-films (DGT) technique for students and professionals.

Author: Bertram Schwartz
Publisher:
ISBN:
Category : Metallic films
Languages : en
Pages :

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Author: Electrochemical Society. Dielectrics and Insulation Division
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Author: Electrochemical Society. Electronics Division
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Author: Devendra Gupta
Publisher: Springer Science & Business Media
ISBN: 9780080947082
Category : Science
Languages : en
Pages : 552

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Book Description
This new game book for understanding atoms at play aims to document diffusion processes and various other properties operative in advanced technological materials. Diffusion in functional organic chemicals, polymers, granular materials, complex oxides, metallic glasses, and quasi-crystals among other advanced materials is a highly interactive and synergic phenomenon. A large variety of atomic arrangements are possible. Each arrangement affects the performance of these advanced, polycrystalline multiphase materials used in photonics, MEMS, electronics, and other applications of current and developing interest. This book is written by pioneers in industry and academia for engineers, chemists, and physicists in industry and academia at the forefront of today's challenges in nanotechnology, surface science, materials science, and semiconductors.