Materials Research Society Symposia Proceedings. Volume 53. Semiconductor-on-Insulator and Thin Film Transistor Technology Held in Boston, Massachusetts on 3-6 December 1985 PDF Download

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Materials Research Society Symposia Proceedings. Volume 53. Semiconductor-on-Insulator and Thin Film Transistor Technology Held in Boston, Massachusetts on 3-6 December 1985

Author: A. Chiang
Publisher:
ISBN:
Category :
Languages : en
Pages : 493

Book Description
The papers in this book have been arranged into five parts. The first three parts, 'Zone Melting and Recrystallization' 'Heteroepitaxy and Porous Silicon', and 'Buried Oxide and Nitride by Implantation' deal with specific approaches for fabricating Semiconductor on Insulator (SOL) material and structures. The last two parts, 'Characterization of SOL Thin Films' and 'Device and Circuit Applications', are more general in scope. Keywords: Symposia; Silicon; Oxides; Nitrides; Semiconductors; Insulators; Thin Film Transistors; Zone Melting; Recrystallization.