Author: Jong-kook ParkPublisher:
ISBN:
Category : Diamond thin films
Languages : en
Pages : 506
Book Description
Maskless Patterning on CVD Diamond Films by Excimer Laser
Author: Jong-kook ParkPublisher:
ISBN:
Category : Diamond thin films
Languages : en
Pages : 506
Book Description
Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605
Author: Maarten De BoerPublisher: Mrs Proceedings
ISBN:
Category : Science
Languages : en
Pages : 344
Book Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Chemical Abstracts
Author: Excimer Laser Etching of CVD Diamond
Author: Sharon BergmanPublisher:
ISBN:
Category : Chemical vapor deposition
Languages : en
Pages : 184
Book Description
Laser Processing and Chemistry
Author: Dieter BäuerlePublisher: Springer Science & Business Media
ISBN: 3662040743
Category : Science
Languages : en
Pages : 788
Book Description
Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This third edition has been revised and enlarged to cover new topics such as the synthesis of nanoclusters and nanocrystalline films, ultrashort-pulse laser processing, laser polishing, cleaning, and lithography. Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
UV Laser-assisted Diamond Deposition
Author: Mengxiao WangPublisher:
ISBN:
Category :
Languages : en
Pages : 100
Book Description
Diamond, due to its unique properties, has been studied for decades. Many diamond synthesis methods have been developed as well. As one of the synthesis methods, combustion flame chemical vapor deposition (CVD) is considered as the most flexible way. Combined with laser irradiation, laser-assisted combustion flame CVD can enhance the deposition process of diamond films. In this thesis work, efforts were made to explore the capability of a laser-assisted combustion flame CVD technique with krypton fluoride (KrF) excimer laser irradiation for improving diamond thin film quality and deposition rate. The research efforts mainly focus on following activities, including: 1) studying the influence of the gap distance between the inner flame and the substrates on crystallographic orientations, quality and deposition rate of the diamond film to determine the optimal parameters for the deposition; 2) conducting in-situ KrF excimer laser irradiation during the deposition process to increase the quality and the growth rate of the diamond film with the optimal deposition parameters, which includes excimer laser irradiation on the diamond film and on the combustion flame; 3) applying post-growth KrF excimer laser irradiation on diamond films, which is aiming to understand and verify the effect of KrF excimer laser irradiation on the diamond film during the deposition. A multi-torch combustion flame CVD was also developed for increasing the efficiency of depositing large-area diamond thin films. Diamond thin films have been deposited on tungsten carbide (WC) by the laser-assisted combustion-flame CVD technique in open atmosphere. A KrF excimer laser was used in the process to: 1) achieve energy coupling into combustion flame; 2) influence species proportions in the combustion flame; 3) promote seeding and nucleation process during diamond film deposition; 4) increase the diamond thin film quality and deposition rate through non-diamond carbon removal. Observations from experimental results confirmed that excimer laser irradiation could promote seeding and nucleation of diamond, growth rate and diamond quality. Furthermore, by changing the gap distance, the crystallographic orientations of diamond films can be controlled successfully and the optimal gap distance for diamond deposition can also be found. With applying a multi-torch setup in laser-assisted combustion flame CVD method, large-area diamond thin films were synthesized efficiently.
Diamond Films by Excimer Laser Photoablation of Polymers
Author: Publisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
HKUST Call Number: Thesis CHEM 1994 Latsch.
Low-Pressure Synthetic Diamond
Author: Bernhard DischlerPublisher: Springer Science & Business Media
ISBN: 3642719929
Category : Science
Languages : en
Pages : 383
Book Description
A comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.
Diamond Films Handbook
Author: Jes AsmussenPublisher: CRC Press
ISBN: 9780203910603
Category : Science
Languages : en
Pages : 692
Book Description
The Diamond Films Handbook is an important source of information for readers involved in the new diamond film technology, emphasizing synthesis technologies and diamond film applications. Containing over 1600 references, drawings, photographs, micrographs, equations, and tables, and contributions by experts from both industry and academia, it inclu
Author: Leo R. Sharkey