Author: Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 1006
Book Description
Scientific and Technical Aerospace Reports
Author: Technical Abstract Bulletin
Author: Scientific and Technical Aerospace Reports
Author: R & D Abstracts
Author: Technology Reports Centre (Great Britain)Publisher:
ISBN:
Category :
Languages : en
Pages : 732
Book Description
Government Reports Annual Index
Author: Publisher:
ISBN:
Category : Government reports announcements & index
Languages : en
Pages : 904
Book Description
Government Reports Announcements & Index
Author: Solid State Technology
Author: The Journal of the Acoustical Society of America
Author: Tech Notes
Author: Publisher:
ISBN:
Category : Electric transformers
Languages : en
Pages : 488
Book Description
Fundamentals of Semiconductor Manufacturing and Process Control
Author: Gary S. MayPublisher: John Wiley & Sons
ISBN: 0471790273
Category : Technology & Engineering
Languages : en
Pages : 428
Book Description
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.