Author: Kurt Alois WickPublisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 138
Book Description
Low Temperature Silicon Sputter Epitaxy
Author: Kurt Alois WickPublisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 138
Book Description
Low-temperature Silicon Sputter-deposition Epitaxy for 3-D Integrated Circuits
Author: Pailu Dennis WangLow Temperature Silicon Epitaxy by Remote, Plasma-enhanced Chemical Vapor Deposition
Author: Scott Dwight HabermehlPublisher:
ISBN:
Category :
Languages : en
Pages : 306
Book Description
Low Temperature Epitaxial Growth of Semiconductors
Author: Takashi HariuPublisher: World Scientific
ISBN: 9789971508395
Category : Technology & Engineering
Languages : en
Pages : 356
Book Description
Low temperature processes for semiconductors have been recently under intensive development to fabricate controlled device structures with minute dimensions in order to achieve the highest device performance and new device functions as well as high integration density. Comprising reviews by experts long involved in the respective pioneering work, this volume makes a useful contribution toward maturing the process of low temperature epitaxy as a whole.
Low Temperature Silicon Epitaxy by Low Pressure Chemical Vapor Deposition with and Without Plasma Enhancement
Author: Wayne Robert BurgerLow Temperature Silicon Epitaxy by Low Pressure Chemical Vapor Deposition with and Without Plasma Enchancement
Author: Wayne Robert BurgerPublisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 119
Book Description
Low Temperature Silicon Epitaxy Using Low Pressure Chemical Vapor Deposition with and Without Plasma Enhancement
Author: Thomas Joseph DonahueLow Temperature Selective Silicon Epitaxy by Ultra-high Vacuum Rapid Thermal Chemical Vapor Deposition Using Disilane, Hydrogen and Chlorine
Author: Katherine Elizabeth ViolettePublisher:
ISBN:
Category :
Languages : en
Pages : 502
Book Description
Low Temperature Silicon Epitaxy Using Low Pressure Chemical Vapor Deposition with and Without Plasma Enhancement
Author: Thomas Joseph DonahuePublisher:
ISBN:
Category : Silicon crystals
Languages : en
Pages : 9
Book Description
Silicon-Molecular Beam Epitaxy
Author: E. KasperPublisher: CRC Press
ISBN: 1351093517
Category : Technology & Engineering
Languages : en
Pages : 302
Book Description
This subject is divided into two volumes. Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. Three chapters on homoepitaxy are followed by two chapters describing the different ways in which MBE may be applied to create insulator/Si stackings which may be used for three-dimensional circuits. The two remaining chapters in Volume I are devoted to device applications. The first three chapters of Volume II treat all aspects of heteroepitaxy with the exception of the epitaxial insulator/Si structures already treated in volume I.