Laser-induced Thin Film Processing PDF Download

Author: J. J. Dubowski
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 496

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Book Description

Author: Ian W. Boyd
Publisher: Springer Science & Business Media
ISBN: 3642831362
Category : Science
Languages : en
Pages : 328

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Book Description
This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser pro cessing of thin films, particularly, though by no means exclu sively, of recent progress in the dielectrics area. The volume covers all the major aspects of laser processing technology in general, from the background and history to its many potential applications, and from the theory to the necessary experimental considerations. It highlights and compares the vast array of processing conditions now available with intense photon beams, as well as the properties of the films and microstructures pro duced. Separate chapters deal with the fundamentals of laser interactions with matter, and with experimental considerations. Detailed consideration is also given to film deposition, nuclea tion and growth, oxidation and annealing, as well as selective and localized. etching and ablation, not only in terms of the various photon-induced processes, but also with respect to traditional as well as other competing new technologies.

Author: J. J. Dubowski
Publisher:
ISBN:
Category : Lasers
Languages : en
Pages : 476

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Book Description

Author: Irving P. Herman
Publisher: Elsevier
ISBN: 0080538088
Category : Technology & Engineering
Languages : en
Pages : 815

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Book Description
This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field. - The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing - Useful as an introduction to the subject or as a resource handbook - Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing - Examples emphasize applications in microelectronics and optoelectronics - Introductory chapter serves as a guide to all optical diagnostics and their applications - Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic

Author: Daniel J. Ehrlich
Publisher: Elsevier
ISBN: 0080918026
Category : Technology & Engineering
Languages : en
Pages : 602

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Book Description
This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.

Author: Ion N. Mihailescu
Publisher: CRC Press
ISBN: 1351733532
Category : Science
Languages : en
Pages : 564

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Book Description
Pulsed laser–based techniques for depositing and processing materials are an important area of modern experimental and theoretical scientific research and development, with promising, challenging opportunities in the fields of nanofabrication and nanostructuring. Understanding the interplay between deposition/processing conditions, laser parameters, as well as material properties and dimensionality is demanding for improved fundamental knowledge and novel applications. This book introduces and discusses the basic principles of pulsed laser–matter interaction, with a focus on its peculiarities and perspectives compared to other conventional techniques and state-of-the-art applications. The book starts with an overview of the growth topics, followed by a discussion of laser–matter interaction depending on laser pulse duration, background conditions, materials, and combination of materials and structures. The information outlines the foundation to introduce examples of laser nanostructuring/processing of materials, pointing out the importance of pulsed laser–based technologies in modern (nano)science. With respect to similar texts and monographs, the book offers a comprehensive review including bottom-up and top-down laser-induced processes for nanoparticles and nanomicrostructure generation. Theoretical models are discussed by correlation with advanced experimental protocols in order to account for the fundamentals and underline physical mechanisms of laser–matter interaction. Reputed, internationally recognized experts in the field have contributed to this book. In particular, this book is suitable for a reader (graduate students as well as postgraduates and more generally researchers) new to the subject of pulsed laser ablation in order to gain physical insight into and advanced knowledge of mechanisms and processes involved in any deposition/processing experiment based on pulsed laser–matter interaction. Since knowledge in the field is given step by step comprehensively, this book serves as a valid introduction to the field as well as a foundation for further specific readings.

Author: D. Bäuerle
Publisher: Springer Science & Business Media
ISBN: 3642823815
Category : Science
Languages : en
Pages : 561

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Book Description
Laser processing is now a rapidly increasing field with many real and potential applications in different areas of technology such as micromecha nics, metallurgy, integrated optics, and semiconductor device fabrication. The neces s ity for such soph i st i cated 1 i ght sources as 1 asers is based on the spatial coherence and the monochromaticity of laser light. The spatial coherence permits extreme focussing of the laser light resulting in the availability of high energy densities which can be used for strongly loca lized heat- and chemical-treatment of materials, with a resolution down to 1 ess than 1 lJIll. When us i ng pul sed or scanned cw-l asers, 1 oca 1 i zat i on in time is also possible. Additionally, the monochromaticity of laser light allows for control of the depth of heat treatment and/or selective, nonthermal bond breaking - within the surface of the material or within the molecules of the surrounding reactive atmosphere - simply by tuning the laser wavelength. These inherent advantages of laser light permit micromachining of materials (drilling, cutting, welding etc.) and also allow single-step controlled area processing of thin films and surfaces. Processes include structural transformation (removal of residual damage, grain growth in polycrystalline material, amorphization, surface hardening etc.), etching, doping, alloying, or deposition. In addition, laser processing is not 1 imited to planar substrates.

Author: Dongfang Yang
Publisher: BoD – Books on Demand
ISBN: 9535128116
Category : Technology & Engineering
Languages : en
Pages : 430

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Book Description
Laser ablation refers to the phenomenon in which a low wavelength and short pulse (ns-fs) duration of laser beam irradiates the surface of a target to induce instant local vaporization of the target material generating a plasma plume consisting of photons, electrons, ions, atoms, molecules, clusters, and liquid or solid particles. This book covers various aspects of using laser ablation phenomenon for material processing including laser ablation applied for the deposition of thin films, for the synthesis of nanomaterials, and for the chemical compositional analysis and surface modification of materials. Through the 18 chapters written by experts from international scientific community, the reader will have access to the most recent research and development findings on laser ablation through original research studies and literature reviews.

Author: Robert Eason
Publisher: John Wiley & Sons
ISBN: 0470052112
Category : Science
Languages : en
Pages : 754

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Book Description
Edited by major contributors to the field, this text summarizes current or newly emerging pulsed laser deposition application areas. It spans the field of optical devices, electronic materials, sensors and actuators, biomaterials, and organic polymers. Every scientist, technologist and development engineer who has a need to grow and pattern, to apply and use thin film materials will regard this book as a must-have resource.

Author: Alberto Piqué
Publisher: John Wiley & Sons
ISBN: 3527805117
Category : Technology & Engineering
Languages : en
Pages : 573

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Book Description
The first book on this hot topic includes such major research areas as printed electronics, sensors, biomaterials and 3D cell printing. Well-structured and with a strong focus on applications, the text is divided in three sections with the first describing the fundamentals of laser transfer. The second provides an overview of the wide variety of materials that can be used for laser transfer processing, while the final section comprehensively discusses a number of practical uses, including printing of electronic materials, printing of 3D structures as well as large-area, high-throughput applications. The book is rounded off by a look at the future for laser printed materials. Invaluable reading for a broad audience ranging from material developers to mechanical engineers, from academic researchers to industrial developers and for those interested in the development of micro-scale additive manufacturing techniques.