Laser Annealing of Semiconductor Surface PDF Download

Author: L. K. Poh
Publisher:
ISBN:
Category : Electron beams
Languages : en
Pages : 14

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Author: J Poate
Publisher: Elsevier
ISBN: 0323145426
Category : Technology & Engineering
Languages : en
Pages : 577

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Book Description
Laser Annealing of Semiconductors deals with the materials science of surfaces that have been subjected to ultrafast heating by intense laser or electron beams. This book is organized into 13 chapters that specifically tackle transient annealing of compound semiconductors. After briefly dealing with an overview of laser annealing, this book goes on discussing the concepts of solidification and crystallization pertinent to the field. These topics are followed by discussions on the main mechanisms of interaction of photon and electron beams with condensed matter; the calculation of thermophysical properties of crystalline materials; and high-speed crystal growth by laser annealing of ion-implanted silicon. The subsequent chapters describe the microstructural and topographical properties of annealed semiconductor layers and the epitaxy of ion-implanted silicon irradiated with a laser or electron beam single pulse. This text also explores the electronic and surface properties and the continuous-wave beam processing of semiconductors. The concluding chapters cover various reactions in metal-semiconductor systems, such as fast and laser-induced melting, solidification, mixing, and quenching. Laser-induced interactions in metal-semiconductor systems and the factors involved in control of the heat treatment process are also discussed in these chapters. Materials scientists and researchers and device engineers will find this book invaluable.

Author: Fuccio Cristiano
Publisher: Woodhead Publishing
ISBN: 0128202564
Category : Technology & Engineering
Languages : en
Pages : 428

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Book Description
Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering. - Introduces the fundamentals of laser materials and device fabrication methods, including laser-matter interactions and laser-related phenomena - Addresses advances in physical modeling and in predictive simulations of laser annealing processes such as atomistic modeling and TCAD simulations - Reviews current and emerging applications of laser annealing processes such as CMOS technology and group IV semiconductors

Author: Horst-Günter Rubahn
Publisher: John Wiley & Sons
ISBN: 9780471984504
Category : Science
Languages : en
Pages : 352

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Book Description
Ob zur Oberflachenanalytik oder zur Oberflachenbearbeitung - die Einsatzgebiete von Lasern in der Materialwissenschaft werden standig erweitert. Dabei ablaufende Prozesse beschranken sich gelegentlich auf einfaches Erwarmen und Schmelzen, haufig finden jedoch kompliziertere Vorgange wie die Bildung von Plasma oder kollektive Anregungen statt. Verschiedenste Techniken, die zugehorigen physikalischen Grundlagen und alle wichtigen Prozesse beschreibt dieses Buch, wobei auch neueste Themen wie ultrakurze Laserpulse oder die nichtlineare Oberflachenspektroskpoie zur Sprache kommen. (05/99)

Author: J.M. Poate
Publisher: Springer Science & Business Media
ISBN: 146133733X
Category : Science
Languages : en
Pages : 413

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Book Description
This book is an outcome of the NATO institute on surface modification which was held in Trevi, 1981. Surface modification and alloying by ion, electron or laser beams is proving to be one of the most burgeoning areas of materials science. The field covers such diverse areas as integrated circuit processing to fabricating wear and corrosion resistant surfaces on mechanical components. The common scientific questions of interest are the microstructures by the different energy deposition techniques. and associated physical properties produced The chapters constitute a critical review of the various subjects covered at Trevi. Each chapter author took responsibility for the overall review and used contributions from the many papers presented at the meeting; each participant gave a presentation. The contributors are listed at the start of each chapter. We took this approach to get some order in a large and diverse field. We are indebted to all the contributors, in particular the chapter authors for working the many papers into coherent packages; to Jim Mayer for hosting a workshop of chapter authors at Cornell and to Ian Bubb who did a sterling job in working over some of the manuscripts. Our special thanks are due to the text processing center at Bell Labs who took on the task of assembling the book. In particular Karen Lieb and Beverly Heravi typed the whole manuscript and had the entire book phototypeset using the Bell Laboratories UNIXTM system.

Author: J. Birman
Publisher: Springer Science & Business Media
ISBN: 1461573416
Category : Science
Languages : en
Pages : 539

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Book Description
The Third Binational USA-USSR Symposium titled "Laser Optics of Con densed Matter" was held in Leningrad 1 June - 5 June 1987. This volume con tains the full text of 64 papers presented at (or prepared for) the Symposium in both plenary and poster sessions. This Symposium reestablished the very productive series of "Light Scattering" Binational Symposia which were initi ated in Moscow in 1975. Unfortunately there was an eight-year hiatus follow ing the Second Symposium in New York (1979). This interval, caused by serious chilling of the climate of USA-USSR collaboration, deprived the active scien tists on both sides of the opportunity to meet and interact in the active format of a conference. During this eight year interval there has been very rapid and intense development of scientific activity in the general area of laser optics phe nomena. The development of ultrafast laser sources has permitted rapid advances in time resolved spectroscopy and ultrafast processes; the field of optical bistability and strong nonlinearity became a hot topic; and intense work is now underway to clarify ideas of photon localization. These new dev elopments complement many advances in the study of low dimensional systems such as surfaces, new work on phase transitions, and novel studies of elemen tary excitations such as polariton-excitons in localized environments such as quantum wells and heterojunctions.

Author:
Publisher:
ISBN:
Category : Laser materials
Languages : en
Pages : 522

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Author: Kashmiri Lal Mittal
Publisher: VSP
ISBN: 9789067643122
Category : Technology & Engineering
Languages : en
Pages : 366

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Book Description
This volume documents the Proceedings of the 5th and 6th Symposia on Particles on Surfaces: Detection, Adhesion and Removal, held under the aegis of the Fine Particle Society in Chicago (May 6--9, 1996) and Dallas (April 1--3, 1998), respectively. The technical programs clearly reflected an interest and need to ameliorate the existing methods and to devise new and more efficient ways to detect, analyze and characterize particles on surfaces. The removal of particles from a host of surfaces was especially highlighted; the need to remove smaller and smaller particles was particularly underscored. All manuscripts included in this volume were properly peer reviewed and all were revised before inclusion in this volume. Thus, this book is not a mere collection of unreviewed papers, but represents information that has passed peer scrutiny. Furthermore, the authors of the 5th Symposium were asked to update the information. So, the information presented in this book should be as fresh and up-to-date as possible. This volume is divided into two parts: Part 1. General Papers and Part 2. Particle Adhesion and Removal. The topics covered include: high-sensitivity rapid detection of particles; detection of particles using evanescent wave scattering; particles on the backside of wafers; particle shedding from fluid-handling components; dynamics of particle adhesion; particle dispersion/aggregation; precision cleaning; and particle removal by surfactants, supercritical fluids, hydrodynamic forces, high-speed droplet impinging, megasonic, CO2 blasting, CO2 snow, argon aerosol, lasers, microcluster beams, brush and chemical-mechanical methods. This volume offers bountiful information and represent a current commentary on the R&D activity taking place in the area of particles on surfaces, particularly particle removal from a variety of surfaces.

Author: L.D. Laude
Publisher: Springer Science & Business Media
ISBN: 9400968906
Category : Technology & Engineering
Languages : en
Pages : 631

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Book Description
The impact of Materials Science in our environment has probably never been as massive and decisive as it is today. In every aspect of our lives, progress has never been so dependent on the techniques involved in producing ever more sophisticated materials in ever larger quantities, nor so demanding for technologists to imagine novel processes and circumvent difficulties, or take up new challenges. Every technique is based on a physical process which is put into practice and optimized. The better we know that process, the better the optimization, and more powerful the technique. Laser processing of materials is inscribed in that context. As soon as powerful coherent light sources were made available, it was realized that such intense sources of energy could be used to "heat, melt and crystallize" materials, i.e., to promote phase transitions in atomic systems. As early as 1964, attempts in that direction were made but received very little (if any) attention. Reasons for this lack of interest were several. For one thing, laser technology was not fully developed, so that the process offered poor reliability and no versatility. Also, improving the existing techniques was believed to be sufficient to meet the needs of the time, and there was no real motivation to explore new ways. Finally, and more important, the fundamentals of the physics behind the scenes were, and continue to be, way out of the runni~g stream.

Author:
Publisher: Academic Press
ISBN: 0080860206
Category : Technology & Engineering
Languages : en
Pages : 671

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Book Description
This volume introduces the subject of laser ablation and desorption to scientists and engineers. It covers fundamental experimental and theoretical tools, models, and techniques, and introduces the most important applications. Clearly written and organized in a straightforward manner, Laser Ablation and Desorption lead the reader straight through the fundamentals of laser-surface interactions. Each chapter is self-contained and includes references to other chapters as necessary, so that readers may begin with the topic of greatest interest and follow the references to other aspects of the subject contained within the book.Key Features* Provides up-to-date information about one of the most active fields in physics today* Written and edited by major figures in the field of laser ablation and desorption* Represents the most comprehensive treatment of the state-of-the-art available