Investigations on Magnetron Sputtered Tantalum Oxide Films PDF Download

Author: Diederik Depla
Publisher: Springer Science & Business Media
ISBN: 3540766642
Category : Technology & Engineering
Languages : en
Pages : 584

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Book Description
In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

Author: S. V. Jagadeesh Chandra
Publisher: LAP Lambert Academic Publishing
ISBN: 9783843394222
Category :
Languages : en
Pages : 188

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Book Description
High permittivity dielectrics are studied intensively in the view of their use in the integrated circuits. However, the real emergence of tantalum oxide (Ta2O5) as a dielectric material happened due to its high-dielectric constant, chemical and thermal stability with the promise of compatibility in microelectronic processing. This book covenants with the optimized deposition conditions of Ta2O5 films formed on quartz and p-type Si substrates using dc and rf reactive magnetron sputtering method for structural and optical studies. Further, aluminum metal deposited as a top electrode on Ta2O5 and Si stack to prepare metal oxide semiconductor device for investigating electrical and dielectric properties. The possible ways for depositing good quality Ta2O5 layers on Si, to obtain high dielectric constant explained in this book are quite useful to prepare high quality metal oxide semiconductor device for capacitor applications.

Author: Ashok Kumar Pandey
Publisher: Springer Nature
ISBN: 3031203534
Category : Technology & Engineering
Languages : en
Pages : 379

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Book Description
This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers the contributions presented at the 6th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Hyderabad, India in December 2022. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).

Author:
Publisher: ScholarlyEditions
ISBN: 1464963908
Category : Technology & Engineering
Languages : en
Pages : 3091

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Book Description
Issues in Electronics Research and Application: 2011 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Electronics Research and Application. The editors have built Issues in Electronics Research and Application: 2011 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Electronics Research and Application in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Issues in Electronics Research and Application: 2011 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.

Author:
Publisher: ScholarlyEditions
ISBN: 1464990549
Category : Science
Languages : en
Pages : 4102

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Book Description
Transition Elements—Advances in Research and Application: 2012 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Transition Elements. The editors have built Transition Elements—Advances in Research and Application: 2012 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Transition Elements in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Transition Elements—Advances in Research and Application: 2012 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.

Author: Wade H. Shafer
Publisher: Springer Science & Business Media
ISBN: 1475757824
Category : Science
Languages : en
Pages : 304

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Book Description
Masters Theses in the Pure and Applied Sciences was first conceived, published, and dis seminated by the Center for lnformation and Numerica/ Data Analysis and Synthesis (C/NDAS) * at Purdue University in 1957, starting its coverage of theses with the academic year 1955. Beginning with Volume 13, the printing and dissemination phases of the ac tivity were transferred to University Microfilms/Xerox of Ann Arbor, Michigan, with the thought that such an arrangement would be more beneficia! to the academic and general scientific and technical community. After fi ve years of this joint undertaking we had concluded that it was in the interest of ali concerned if the printing and distribution of the volume were handled by an international publishing house to assure improved service and broader dissemination. Hence, starting with Volume 18, Masters Theses in the Pure and App/ied Sciences has been disseminated on a worldwide basis by Plenum Publishing Corporation of New York, and in the same year the coverage was broadened to include Canadian universities. Ali back issues can also be ordered from Plenum. We have reported in Volume 21 (thesis year 1976) a total of 10,586 theses titles from 25 Canadian and 219 United States universities. We are sure that this broader base for theses titles reported will greatly enhance the value of this important annual reference work.

Author: William Dickson Westwood
Publisher:
ISBN:
Category : Science
Languages : en
Pages : 480

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Book Description

Author: A. A. M. Sayigh
Publisher: Elsevier
ISBN: 0080540511
Category : Science
Languages : en
Pages : 634

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Book Description
The World Renewable Energy Congress is a key event at the start of the 21st century.It is a vital forum for researchers with an interest in helping renewables to reach their full potential. The effects of global warming and pollution are becoming more apparent for all to see - and the development of renewable solutions to these problems is increasingly important globally.If you were unable to attend the conference, the proceedings will provide an invaluable comprehensive summary of the latest topics and papers.

Author:
Publisher: ScholarlyEditions
ISBN: 146492077X
Category : Science
Languages : en
Pages : 1063

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Book Description
Transition Elements: Advances in Research and Application: 2011 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Transition Elements. The editors have built Transition Elements: Advances in Research and Application: 2011 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Transition Elements in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Transition Elements: Advances in Research and Application: 2011 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.

Author: J M Marshall
Publisher: World Scientific
ISBN: 9814543705
Category :
Languages : en
Pages : 582

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Book Description
This volume constitutes the proceedings of the tenth meeting of the International school on Condensed Matter Physics. Since 1980, this community of condensed matter scientists has gathered in Varna, Bulgaria, every two years, to review and discuss the development of various investigations in the field, to present the latest results, and to outline the most important trends in condensed matter science.The book reflects the development of the field, and points to the growing interest in the application of theoretical achievements and to the mutual inspirations of science and technology.