Integrated Circuit Metrology, Inspection, and Process Control V PDF Download

Author: William H. Arnold
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 648

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Author:
Publisher:
ISBN:
Category : Electronic circuit design
Languages : en
Pages : 576

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Author: Kevin M. Monahan
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 340

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Author: Kevin M. Monahan
Publisher:
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 556

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Author: Michael T. Postek
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 716

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Author: Kevin M. Monahan
Publisher:
ISBN:
Category : Mathematics
Languages : en
Pages : 476

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Author: Alain C. Diebold
Publisher: CRC Press
ISBN: 0203904540
Category : Technology & Engineering
Languages : en
Pages : 703

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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay

Author: National Semiconductor Metrology Program (U.S.)
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 136

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Author: National Institute of Standards and Technology (U.S.)
Publisher:
ISBN:
Category : Semiconductors
Languages : en
Pages : 160

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Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 160

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