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Author: Publisher: ISBN: Category : Languages : en Pages :
Book Description
A thin film deposition method uses a vacuum confinement cup that employs a dense hot filament and multiple gas inlets. At least one reactant gas is introduced into the confinement cup both near and spaced apart from the heated filament. An electrode inside the confinement cup is used to generate plasma for film deposition. The method is used to deposit advanced thin films (such as silicon based thin films) at a high quality and at a high deposition rate.
Author: Publisher: ISBN: Category : Languages : en Pages :
Book Description
A thin film deposition method uses a vacuum confinement cup that employs a dense hot filament and multiple gas inlets. At least one reactant gas is introduced into the confinement cup both near and spaced apart from the heated filament. An electrode inside the confinement cup is used to generate plasma for film deposition. The method is used to deposit advanced thin films (such as silicon based thin films) at a high quality and at a high deposition rate.
Author: D.M. Dobkin Publisher: Springer Science & Business Media ISBN: 9401703698 Category : Technology & Engineering Languages : en Pages : 277
Book Description
Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equipment. This book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field. The book reviews several disparate fields with which many researchers may have only a passing acquaintance, such as heat and mass transfer, discharge physics, and surface chemistry, focusing on key issues relevant to CVD. The book also examines examples of realistic industrial reactors and processes with simplified analysis to demonstrate how to apply the principles to practical situations. The book does not attempt to exhaustively survey the literature or to intimidate the reader with irrelevant mathematical apparatus. This book is as simple as possible while still retaining the essential physics and chemistry. The book is generously illustrated to assist the reader in forming the mental images which are the basis of understanding.
Author: Moumita Mukherjee Publisher: BoD – Books on Demand ISBN: 9533079681 Category : Technology & Engineering Languages : en Pages : 562
Book Description
Silicon Carbide (SiC) and its polytypes, used primarily for grinding and high temperature ceramics, have been a part of human civilization for a long time. The inherent ability of SiC devices to operate with higher efficiency and lower environmental footprint than silicon-based devices at high temperatures and under high voltages pushes SiC on the verge of becoming the material of choice for high power electronics and optoelectronics. What is more important, SiC is emerging to become a template for graphene fabrication, and a material for the next generation of sub-32nm semiconductor devices. It is thus increasingly clear that SiC electronic systems will dominate the new energy and transport technologies of the 21st century. In 21 chapters of the book, special emphasis has been placed on the materials aspects and developments thereof. To that end, about 70% of the book addresses the theory, crystal growth, defects, surface and interface properties, characterization, and processing issues pertaining to SiC. The remaining 30% of the book covers the electronic device aspects of this material. Overall, this book will be valuable as a reference for SiC researchers for a few years to come. This book prestigiously covers our current understanding of SiC as a semiconductor material in electronics. The primary target for the book includes students, researchers, material and chemical engineers, semiconductor manufacturers and professionals who are interested in silicon carbide and its continuing progression.
Author: B. D. Sartwell Publisher: Elsevier ISBN: 1483274659 Category : Technology & Engineering Languages : en Pages : 981
Book Description
Surface & Coatings Technology, Volume 61 presents the proceeding of the 20th International Conference on Metallurgical Coatings and Thin Films, held in San Diego, California, on April 19–23, 1993. This book discusses a variety of topics related to surface and coatings technology, including coatings for use at high temperature, hard coatings, and vapor deposition technology. Organized into 141 chapters, this compilation of papers begins with an overview of the coating requirements for long-life bucket protection, how each of these coating systems has performed, and the advantages and disadvantages of each. This text then discusses the gradient-free transition step achieved in the element analysis of the depth profiles. Other chapters consider the metastable yttrium oxide films that are synthesized using reactive sputter deposition. This book discusses as well the use of appropriate copper-based alloy coatings on structural components. The final chapter deals with the particle mechanical and thermal behavior in the process of high velocity oxy-fuel spraying. This book is a valuable resource for chemical engineers and metallurgists.
Author: Gang Zhang Publisher: Elsevier ISBN: 0323473466 Category : Technology & Engineering Languages : en Pages : 386
Book Description
Thermal Transport in Carbon-Based Nanomaterials describes the thermal properties of various carbon nanomaterials and then examines their applications in thermal management and renewable energy. Carbon nanomaterials include: one-dimensional (1D) structures, like nanotubes; two-dimensional (2D) crystal lattice with only one-atom-thick planar sheets, like graphenes; composites based on carbon nanotube or graphene, and diamond nanowires and thin films. In the past two decades, rapid developments in the synthesis and processing of carbon-based nanomaterials have created a great desire among scientists to gain a greater understanding of thermal transport in these materials. Thermal properties in nanomaterials differ significantly from those in bulk materials because the characteristic length scales associated with the heat carriers, phonons, are comparable to the characteristic length. Carbon nanomaterials with high thermal conductivity can be applied in heat dissipation. This looks set to make a significant impact on human life and, with numerous commercial developments emerging, will become a major academic topic over the coming years. This authoritative and comprehensive book will be of great use to both the existing scientific community in this field, as well as for those who wish to enter it. - Includes coverage of the most important and commonly adopted computational and experimental methods to analyze thermal properties in carbon nanomaterials - Contains information about the growth of carbon nanomaterials, their thermal properties, and strategies to control thermal properties and applications, allowing readers to assess how to use each material most efficiently - Offers a comprehensive overview of the theoretical background behind thermal transport in carbon nanomaterials
Author: Valentine Kanyanta Publisher: Springer ISBN: 3319292919 Category : Technology & Engineering Languages : en Pages : 244
Book Description
This book discusses microstructure-property correlations and explores key microstructure features and how they affect the properties of a material. The authors discuss the effect of manufacturing and processing routes on microstructure and properties. They identify appropriate microstructure and mechanical characterization techniques essential for developing accurate microstructure-property relationships. The techniques include high resolution imaging methods and properties measurements such as hardness, strength, elastic modulus, and fracture toughness. Current and future trends in hard and superhard material design are revealed by the authors, including nanostructured materials, biomimicry, and novel manufacturing technologies.
Author: Klaus D. Sattler Publisher: CRC Press ISBN: 1000710157 Category : Technology & Engineering Languages : en Pages : 485
Book Description
21st Century Nanoscience - A Handbook: Low-Dimensional Materials and Morphologies (Volume 4) will be the most comprehensive, up-to-date large reference work for the field of nanoscience. Handbook of Nanophysics by the same editor published in the fall of 2010 and was embraced as the first comprehensive reference to consider both fundamental and applied aspects of nanophysics. This follow-up project has been conceived as a necessary expansion and full update that considers the significant advances made in the field since 2010. It goes well beyond the physics as warranted by recent developments in the field. This fourth volume in a ten-volume set covers low-dimensional materials and morphologies. Key Features: Provides the most comprehensive, up-to-date large reference work for the field. Chapters written by international experts in the field. Emphasises presentation and real results and applications. This handbook distinguishes itself from other works by its breadth of coverage, readability and timely topics. The intended readership is very broad, from students and instructors to engineers, physicists, chemists, biologists, biomedical researchers, industry professionals, governmental scientists, and others whose work is impacted by nanotechnology. It will be an indispensable resource in academic, government, and industry libraries worldwide. The fields impacted by nanophysics extend from materials science and engineering to biotechnology, biomedical engineering, medicine, electrical engineering, pharmaceutical science, computer technology, aerospace engineering, mechanical engineering, food science, and beyond.
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Author: D.M. Dobkin
Author: Moumita Mukherjee
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Author: Oliver Williams
Author: B. D. Sartwell
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Author: Gang Zhang
Author: Valentine Kanyanta
Author: Klaus D. Sattler