Formation of NP Junctions Using In-situ Phosphorus Doped Selective Si1-xGex Alloys for CMOS Technology Nodes Beyond 50nm PDF Download

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Formation of NP Junctions Using In-situ Phosphorus Doped Selective Si1-xGex Alloys for CMOS Technology Nodes Beyond 50nm

Formation of NP Junctions Using In-situ Phosphorus Doped Selective Si1-xGex Alloys for CMOS Technology Nodes Beyond 50nm PDF Author: Inkuk Kang
Publisher:
ISBN:
Category :
Languages : en
Pages : 102

Book Description
Keywords: BTBT Tunneling, gated diode, Raised source and drain, SiGe, In-situ phosporus doping, Selective Epitaxial growth.
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