Femtosecond Laser Microfabrication for Opto-microfluidic Devices in Glass PDF Download

Author: Daiying Zhang
Publisher:
ISBN:
Category : Femtosecond lasers
Languages : en
Pages : 0

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Author: Roberto Osellame
Publisher: Springer Science & Business Media
ISBN: 364223366X
Category : Science
Languages : en
Pages : 485

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Book Description
Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.

Author: Koji Sugioka
Publisher: Springer Science & Business Media
ISBN: 1447155416
Category : Technology & Engineering
Languages : en
Pages : 131

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Book Description
Femtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensional microfluidics, micromechanics, microelectronics and microoptics embedded in the glass. Further, these microcomponents can be easily integrated in a single glass microchip by the simple procedure using the femtosecond laser. Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfluidic, optofludic and lab-on-a-chip devices and thereby many researches on this topic are currently being carried out. This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfluidics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent and practical applications to biochemical analysis.

Author: Daiying Zhang
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Book Description
Opto-microfluidics is a novel technology that integrates optical devices and systems with microchannels to investigate the properties of fluids. Opto-microfluidic devices have been increasingly recognized as important miniaturized devices for optical measurements, biological analyses, and chemical syntheses. These devices significantly reduce reagent consumption, waste production, analysis time and labour costs. Common fabrication techniques include soft lithography, microelectromechanical systems (MEMS) and hot embossing. In this dissertation, opto-microfluidic devices fabricated by two-photon polymerization (TPP) technique with femtosecond lasers and standard soft lithography are proposed. After analyzing the fabrication properties of the femtosecond laser, we choose optimal parameters to fabricate optical structures in photoresist material SU-8, and integrate them with microchannels which are produced by a standard soft lithographic technique. Diffractive grating, Mach-Zehnder interferometer (MZI) and optical microring resonators based refractive index (RI) and temperature sensors are designed, fabricated and demonstrated. The sensitivities in different conditions are thoroughly investigated. By combining fluid mechanics and optics, two functional opto-microfluidic devices realizing simultaneous particle sorting and RI sensing are successfully proved. In these devices, filters fabricated by femtosecond lasers are used to sieve and control the flow of particles in suspension, and then the purified liquid is induced into the optical structures to measure the RI. The opto-microfluidic devices described in this dissertation verify the practicability and effectiveness as a lab-on-a-chip platform.

Author: Anming Hu
Publisher: Springer Nature
ISBN: 3030593134
Category : Science
Languages : en
Pages : 360

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Book Description
This book provides a comprehensive overview of the latest advances in laser techniques for micro-nano-manufacturing and an in-depth analysis of applications, such as 3D printing and nanojoining. Lasers have gained increasing significance as a precise tool for advanced manufacturing. Written by world leading scientists, the first part of the book presents the fundamentals of laser interaction with materials at the micro- and nanoscale, including multiphoton excitation and nonthermal melting, and allows readers to better understand advanced processing. In the second part, the authors focus on various advanced fabrications, such as laser peening, surface nanoengineering, and plasmonic heating. Finally, case studies are devoted to special applications, such as 3D printing, microfluidics devices, energy devices, and plasmonic and photonic waveguides. This book integrates both theoretical and experimental analysis. The combination of tutorial chapters and concentrated case studies will be critically attractive to undergraduate and graduate students, researchers, and engineers in the relevant fields. Readers will grasp the full picture of the application of laser for micro-nanomanufacturing and 3D printing.

Author: Sang-Joon John Lee
Publisher: Artech House
ISBN: 1596934727
Category : Electronic books
Languages : en
Pages : 276

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Book Description
Providing a definitive source of knowledge about the principles, materials, and process techniques used in the fabrication of microfluidics, this practical volume is a must for your reference shelf. The book focuses on fabrication, but also covers the basic purpose, benefits, and limitations of the fabricated structures as they are applied to microfluidic sensor and actuator functions. You find guidance on rapidly assessing options and tradeoffs for the selection of a fabrication method with clear tabulated process comparisons.

Author: Hiroaki Misawa
Publisher: John Wiley & Sons
ISBN: 3527608400
Category : Technology & Engineering
Languages : en
Pages : 403

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Book Description
A thorough introduction to 3D laser microfabrication technology, leading readers from the fundamentals and theory to its various potent applications, such as the generation of tiny objects or three-dimensional structures within the bulk of transparent materials. The book also presents new theoretical material on dielectric breakdown, allowing a better understanding of the differences between optical damage on surfaces and inside the bulk, as well as a look into the future. Chemists, physicists, materials scientists and engineers will find this a valuable source of interdisciplinary knowledge in the field of laser optics and nanotechnology.

Author: Koji Sugioka
Publisher: CRC Press
ISBN: 9814303690
Category : Science
Languages : en
Pages : 606

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Book Description
Over the past few decades, the rapid development of ultrafast lasers, such as femtosecond lasers and picosecond lasers, has opened up new avenues for material processing due to their unique features such as ultrashort pulse width and extremely high peak intensity. These techniques have become a common tool for micro- and nanoprocessing of a variety

Author: Nikolaos A Vainos
Publisher: Elsevier
ISBN: 0857096222
Category : Technology & Engineering
Languages : en
Pages : 492

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Book Description
The use of lasers in the processing of electronic and photonic material is becoming increasingly widespread, with technological advances reducing costs and increasing both the quality and range of novel devices which can be produced. Laser growth and processing of photonic devices is the first book to review this increasingly important field.Part one investigates laser-induced growth of materials and surface structures, with pulsed laser deposition techniques, the formation of nanocones and the fabrication of periodic photonic microstructures explored in detail. Laser-induced three-dimensional micro- and nano-structuring are the focus of part two. Exploration of multiphoton lithography, processing and fabrication is followed by consideration of laser-based micro- and nano-fabrication, laser-induced soft matter organization and microstructuring, and laser-assisted polymer joining methods. The book concludes in part three with an investigation into laser fabrication and manipulation of photonic structures and devices. Laser seeding and thermal processing of glass with nanoscale resolution, laser-induced refractive index manipulation, and the thermal writing of photonic devices in glass and polymers are all considered.With its distinguished editor and international team of expert contributors, Laser growth and processing of photonic devices is an essential tool for all materials scientists, engineers and researchers in the microelectronics industry. - The first book to review the increasingly important field of laser growth and processing of photonic devices - Investigates laser-induced growth of materials and surface structures, pulsed laser deposition techniques, the formation of nanocones and the fabrication of periodic photonic microstructures - Examines laser-induced three-dimensional micro- and nano-structuring and concludes with an investigation into laser fabrication and manipulation of photonic structures and devices

Author: Koji Sugioka
Publisher: Springer
ISBN: 3642105238
Category : Science
Languages : en
Pages : 353

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Book Description
Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials. It reviews the sate of the art of research and technological development in the area of laser processing.