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Author: Michel Pons Publisher: ISBN: Category : Languages : en Pages : 203
Book Description
CETTE ETUDE DE L'INTERACTION PLASMA/POLYMERE PREND EN COMPTE LES MECANISMES DE SURFACE FAISANT INTERVENIR LES PROPRIETES PHYSICO-CHIMIQUES DES POLYMERES: TEMPERATURE DE TRANSITION VITREUSE, PROPRIETES VISCOELASTIQUES, MASSE MOLECULAIRE, STRUCTURE CHIMIQUE ET DEGRE DE RETICULATION. NOUS MONTRONS QUE LA TEMPERATURE DE TRANSITION VITREUSE EST UN PARAMETRE PHYSIQUE ESSENTIEL DE L'INTERACTION PLASMA/POLYMERE. DANS LES PLASMAS D'OXYGENE, LORSQU'ON FRANCHIT CETTE TEMPERATURE, ON OBSERVE TOUJOURS QUEL QUE SOIT LE TYPE DE POLYMERE, UNE AUGMENTATION DE LA VITESSE DE GRAVURE EN ECHELON. CETTE AUGMENTATION EST CORRELEE A LA VARIATION DE CAPACITE CALORIFIQUE DU POLYMERE A LA TRANSITION VITREUSE. LA DEGRADATION (GRAPHITISATION) EN VOLUME EST EGALEMENT RELIEE A CE CHANGEMENT D'ETAT DU POLYMERE PAR LE BIAIS DU PHENOMENE D'AUTODIFFUSION DES CHAINES. NOUS MONTRONS QUE LA SCISSION DES CHAINES QUI PEUT SE PRODUIRE SOUS L'EFFET DU PLASMA, FACILITE LA DEGRADATION. A L'INVERSE, CE PHENOMENE PEUT ETRE EVITE PAR UNE RETICULATION (AVANT OU PENDANT LE TRAITEMENT PLASMA) QUI INHIBE LA DIFFUSION. LA COMPREHENSION DES MECANISMES DE GRAVURE ET DE DEGRADATION DES POLYMERES DANS LES PLASMAS A PERMIS, EN MICROELECTRONIQUE, D'AMELIORER DE NOUVEAUX PROCEDES. AINSI LE DEVELOPPEMENT SELECTIF DES RESINES SILYLEES EN PLASMA D'OXYGENE A ETE OPTIMISE. POUR CELA, LES CONDITIONS DE FORMATION D'UN MASQUE RESISTANT ONT ETE ETUDIEES EN FONCTION DE LA TEMPERATURE, DE LA PRESSION D'OXYGENE ET DE L'ENERGIE DES IONS. DANS LE CAS DES SYSTEMES TRICOUCHES, L'ETUDE MONTRE QU'UNE ANISOTROPIE PARFAITE PEUT ETRE OBTENUE, A TEMPERATURE AMBIANTE, PAR PASSIVATION LATERALE DES FLANCS DE GRAVURE EN UTILISANT UN PLASMA SO#2-O#2. CE PROCEDE PERMET LA REALISATION DE MOTIFS LITHOGRAPHIQUES DE DIMENSIONS DE L'ORDRE DU QUART DE MICRON
Author: Michel Pons Publisher: ISBN: Category : Languages : en Pages : 203
Book Description
CETTE ETUDE DE L'INTERACTION PLASMA/POLYMERE PREND EN COMPTE LES MECANISMES DE SURFACE FAISANT INTERVENIR LES PROPRIETES PHYSICO-CHIMIQUES DES POLYMERES: TEMPERATURE DE TRANSITION VITREUSE, PROPRIETES VISCOELASTIQUES, MASSE MOLECULAIRE, STRUCTURE CHIMIQUE ET DEGRE DE RETICULATION. NOUS MONTRONS QUE LA TEMPERATURE DE TRANSITION VITREUSE EST UN PARAMETRE PHYSIQUE ESSENTIEL DE L'INTERACTION PLASMA/POLYMERE. DANS LES PLASMAS D'OXYGENE, LORSQU'ON FRANCHIT CETTE TEMPERATURE, ON OBSERVE TOUJOURS QUEL QUE SOIT LE TYPE DE POLYMERE, UNE AUGMENTATION DE LA VITESSE DE GRAVURE EN ECHELON. CETTE AUGMENTATION EST CORRELEE A LA VARIATION DE CAPACITE CALORIFIQUE DU POLYMERE A LA TRANSITION VITREUSE. LA DEGRADATION (GRAPHITISATION) EN VOLUME EST EGALEMENT RELIEE A CE CHANGEMENT D'ETAT DU POLYMERE PAR LE BIAIS DU PHENOMENE D'AUTODIFFUSION DES CHAINES. NOUS MONTRONS QUE LA SCISSION DES CHAINES QUI PEUT SE PRODUIRE SOUS L'EFFET DU PLASMA, FACILITE LA DEGRADATION. A L'INVERSE, CE PHENOMENE PEUT ETRE EVITE PAR UNE RETICULATION (AVANT OU PENDANT LE TRAITEMENT PLASMA) QUI INHIBE LA DIFFUSION. LA COMPREHENSION DES MECANISMES DE GRAVURE ET DE DEGRADATION DES POLYMERES DANS LES PLASMAS A PERMIS, EN MICROELECTRONIQUE, D'AMELIORER DE NOUVEAUX PROCEDES. AINSI LE DEVELOPPEMENT SELECTIF DES RESINES SILYLEES EN PLASMA D'OXYGENE A ETE OPTIMISE. POUR CELA, LES CONDITIONS DE FORMATION D'UN MASQUE RESISTANT ONT ETE ETUDIEES EN FONCTION DE LA TEMPERATURE, DE LA PRESSION D'OXYGENE ET DE L'ENERGIE DES IONS. DANS LE CAS DES SYSTEMES TRICOUCHES, L'ETUDE MONTRE QU'UNE ANISOTROPIE PARFAITE PEUT ETRE OBTENUE, A TEMPERATURE AMBIANTE, PAR PASSIVATION LATERALE DES FLANCS DE GRAVURE EN UTILISANT UN PLASMA SO#2-O#2. CE PROCEDE PERMET LA REALISATION DE MOTIFS LITHOGRAPHIQUES DE DIMENSIONS DE L'ORDRE DU QUART DE MICRON
Author: P. Misaelides Publisher: Springer Science & Business Media ISBN: 9401584591 Category : Technology & Engineering Languages : en Pages : 668
Book Description
The development of advanced materials with preselected properties is one of the main goals of materials research. Of especial interest are electronics, high-temperature and supemard materials for various applications, as well as alloys with improved wear, corrosion and mechanical resistance properties. The technical challenge connected with the production of these materials is not only associated with the development of new specialised preparation techniques but also with quality control. The energetic charged particle, electron and photon beams offer the possibility of modifying the properties of the near-surface regions of materials without seriously affecting their bulk, and provide unique analytical tools for testing their qUality. This volume includes most of the lectures and contributions delivered at the NATO-funded Advanced Study Institute "Application of Particle and Laser Beams in Materials Technology", which was held in Kallithea, Chalkidiki, in Northern Greece, from the 8th to the 21st of May, 1994 and attended by 73 participants from 21 countries. The aim of this ASI was to provide to the participants an overview of this rapidly expanding field. Fundamental aspects concerning the interactions and collisions on atomic, nuclear and solid state scale were presented in a didactic way, along with the application of a variety of techniques for the solution of problems ranging from the development of electronics materials to corrosion research and from archaeometry to environmental protection.
Author: Wade H. Shafer Publisher: Springer Science & Business Media ISBN: 1461573947 Category : Science Languages : en Pages : 430
Book Description
Masters Theses in the Pure and Applied Sciences was first conceived, published, and disseminated by the Center for Information and Numerical Oata Analysis and Synthesis (CINOAS) * at Purdue. University in 1957, starting its coverage of theses with the academic year 1955. Beginning with Volume 13, the printing and dissemination phases of the activity were transferred to University Microfilms/Xerox of Ann Arbor, Michigan, with the thought that such an arrangement would be more beneficial to the academic and general scientific and technical community. After five years of this joint undertaking we had concluded that it was in the interest of all con cerned if the printing and distribution of the volumes were handled by an interna tional publishing house to assure improved service and broader dissemination. Hence, starting with Volume 18, Masters Theses in the Pure and Applied Sciences has been disseminated on a worldwide basis by Plenum Publishing Cor poration of New York, and in the same year the coverage was broadened to include Canadian universities. All back issues can also be ordered from Plenum. We have reported in Volume 33 (thesis year 1988) a total of 13,273 theses titles from 23 Canadian and 1 85 United States universities. We are sure that this broader base for these titles reported will greatly enhance the value of this important annual reference work. While Volume 33 reports theses submitted in 1988, on occasion, certain univer sities do report theses submitted in previous years but not reported at the time.
Author: Philip Molyneux Publisher: CRC Press ISBN: 1351086073 Category : Science Languages : en Pages : 278
Book Description
Although several monographs and reviews have appeared on individual polymers of this type, and their applications and other technical aspects have also been discussed, this is apparently the first book to deal with the physical chemistry of water-soluble synthetic polymers as a group. This collective survey enables their properties and behaviour to be compared, and to be correlated with their molecular structures for predictive purposes. However, this has made it necessary to critically re-appraise much of the earlier fundamental work, so that current discussion of more recent work can be put on ta proper basis. Thus, of the 1800 or so references cited, the middle two-thirds related to the twenty-year period centred on about 1968. Nevertheless, sufficient key recent references have also been included so that the existing ‘state of the art is delineated.
Author: Michel Pons
Author: Michel Pons
Author: P. Misaelides
Author: 
Author: Wade H. Shafer
Author: 
Author: Evgeny Shulzinger
Author: American Chemical Society
Author: Philip Molyneux
Author: Michael Szycher
Author: