Author: Publisher:
ISBN:
Category : Aeronautics
Languages : en
Pages : 702
Book Description
Scientific and Technical Aerospace Reports
Author: Applied Mechanics Reviews
Author: Dissertation Abstracts International
Author: Publisher:
ISBN:
Category : Dissertations, Academic
Languages : en
Pages : 846
Book Description
NASA Technical Memorandum
Author: Spectroscopic Ellipsometry
Author: Hiroyuki FujiwaraPublisher: John Wiley & Sons
ISBN: 9780470060186
Category : Technology & Engineering
Languages : en
Pages : 388
Book Description
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Chemical Abstracts
Author: Aeronautical Engineering: A Cumulative Index to a Continuing Bibliography (supplement 325)
Author: International Aerospace Abstracts
Author: Physics Briefs
Author: Ceramic Abstracts
Author: American Ceramic SocietyPublisher:
ISBN:
Category : Ceramics
Languages : en
Pages : 1150
Book Description