Eighth International Symposium on Laser Metrology PDF Download

Author:
Publisher: Society of Photo Optical
ISBN: 9780819457585
Category : Technology & Engineering
Languages : en
Pages :

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Includes Proceedings Vol. 5776

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ISBN:
Category :
Languages : en
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Author: International Symposium on Laser Metrology
Publisher:
ISBN:
Category : Laser interferometers
Languages : en
Pages :

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Author:
Publisher:
ISBN:
Category :
Languages : en
Pages : 205

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Author: R. Rodriguez-Vera
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Mathematics
Languages : en
Pages : 886

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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Author: Yuri V. Chugui
Publisher:
ISBN:
Category : Lasers
Languages : en
Pages : 1326

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Author: Wei Gao
Publisher: Elsevier
ISBN: 0128178515
Category : Technology & Engineering
Languages : en
Pages : 452

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Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects

Author: International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life (7, 2002, Novosibirsk)
Publisher:
ISBN:
Category :
Languages : en
Pages :

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Author: Heidi Ottevaere
Publisher: SPIE-International Society for Optical Engineering
ISBN:
Category : Technology & Engineering
Languages : en
Pages : 370

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Book Description
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Author: Günter Wilkening
Publisher: John Wiley & Sons
ISBN: 3527606874
Category : Technology & Engineering
Languages : en
Pages : 541

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The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing