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Author: Publisher: ISBN: Category : Languages : en Pages : 110
Book Description
This program constructed and demonstrated an apparatus for the development of laser diagnostics for the gas phase molecules involved in semiconductor fabrication techniques, particularly the organometallic chemical vapor deposition of compound semiconductors like gallium arsenide. Work in this apparatus, a flow tube with mirrors for long path tunable infrared diode laser absorption and electrodes for a radio frequency glow discharge, culminated in observations designed to assess the importance of arsenic hydride radicals in the decomposition of organoarsenic compounds. Preliminary observations of fluorocarbon and methane plasmas produced observations of several species which could be compared with models and other observations and which added to knowledge of these systems with their important applications in silicon etching an diamond deposition. The program also resulted in band strength measurements for the methyl and difluorocarbene radicals, using tunable diode laser, dye laser, and fast flow reactor techniques.
Author: Publisher: ISBN: Category : Languages : en Pages : 110
Book Description
This program constructed and demonstrated an apparatus for the development of laser diagnostics for the gas phase molecules involved in semiconductor fabrication techniques, particularly the organometallic chemical vapor deposition of compound semiconductors like gallium arsenide. Work in this apparatus, a flow tube with mirrors for long path tunable infrared diode laser absorption and electrodes for a radio frequency glow discharge, culminated in observations designed to assess the importance of arsenic hydride radicals in the decomposition of organoarsenic compounds. Preliminary observations of fluorocarbon and methane plasmas produced observations of several species which could be compared with models and other observations and which added to knowledge of these systems with their important applications in silicon etching an diamond deposition. The program also resulted in band strength measurements for the methyl and difluorocarbene radicals, using tunable diode laser, dye laser, and fast flow reactor techniques.
Author: Publisher: ISBN: Category : Aeronautics Languages : en Pages : 602
Book Description
Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.
Author: J. C. Wormhoudt Publisher: ISBN: Category : Languages : en Pages : 34
Book Description
This is the first annual report on a program to develop laser spectroscopic diagnostics for detection of gas phase species important in fabrication processes for advanced semiconductor materials. It has two objectives, to obtain quantitative spectroscopic data for these molecules, and to apply diagnostics to model fabrication systems. This report summarizes progress in the areas of investigation identified in the first year: chlorine atom detection using an infrared tunable diode laser, which will also be used to instrument a plasma etching reactor, and infrared and laser induced fluorescence spectroscopic studies of SiF2, CF2, and SiH2. Keywords include: Diagnostic Instrumentation, Electronic Materials, Infrared Absorption, Lasers, Laser-Induced Fluorescence, Microelectronic Fabrication, Semiconductor Processing, and Spectroscopy.
Author: Ernst-Christian Koch Publisher: John Wiley & Sons ISBN: 3527644199 Category : Science Languages : en Pages : 362
Book Description
Metal-Fluorocarbon Based Energetic Materials This exciting new book details all aspects of a major class of pyrolants and elucidates the progress that has been made in the field, covering both the chemistry and applications of these compounds. Written by a pre-eminent authority on the subject from the NATO Munitions Safety Information Analysis Center (MSIAC), it begins with a historical overview of the development of these materials, followed by a thorough discussion of their ignition, combustion and radiative properties. The next section explores the multiple facets of their military and civilian applications, as well as industrial synthetic techniques. The critical importance of the associated hazards, namely sensitivity, stability and aging, are discussed in detail, and the book is rounded off by an examination of the future of this vital and expanding field. The result is a complete guide to the chemistry, manufacture, applications and required safety precautions of pyrolants for both the military and chemical industries. From the preface: “... This book fills a void in the collection of pyrotechnic literature... it will make an excellent reference book that all researchers of pyrolants and energetics must have...” Dr. Bernard E. Douda, Dr. Sara Pliskin, NAVSEA Crane, IN, USA
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Author: J. C. Wormhoudt
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Author: Ernst-Christian Koch
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Author: Steven Aragon
Author: J. W. Elam
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Author: Peter Ljungberg