Design, Test, and Microfabrication of MEMS and MOEMS PDF Download

Author: Bernard Courtois
Publisher:
ISBN:
Category : Computer-aided design
Languages : en
Pages : 694

View

Book Description

Author:
Publisher:
ISBN:
Category : Computer-aided design
Languages : en
Pages : 648

View

Book Description

Author: M. Edward Motamedi
Publisher: SPIE Press
ISBN: 9780819450210
Category : Technology & Engineering
Languages : en
Pages : 640

View

Book Description
This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.

Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1482274000
Category : Technology & Engineering
Languages : en
Pages : 764

View

Book Description
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter

Author: Marc J. Madou
Publisher: CRC Press
ISBN: 1351990616
Category : Technology & Engineering
Languages : en
Pages : 3817

View

Book Description
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

Author: John A. Pelesko
Publisher: CRC Press
ISBN: 1420035290
Category : Mathematics
Languages : en
Pages : 382

View

Book Description
Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o

Author: Nitaigour P. Mahalik
Publisher: Springer Science & Business Media
ISBN: 3540293396
Category : Technology & Engineering
Languages : en
Pages : 478

View

Book Description
Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.

Author: Tom Proulx
Publisher: Springer Science & Business Media
ISBN: 1441997164
Category : Science
Languages : en
Pages : 378

View

Book Description
The Collection embraces Structural Dynamics and Renewable Energy into more than 50 categories, including Shock and Vibration, Damping in Solids, Nonlinear Modeling, Structural Health Modeling, Structural Dynamics, and Rotating Machinery. This the first volume of the five-volume set brings together 34 chapters on Structural Dynamics and Renewable Energy.

Author: Nam-Trung Nguyen
Publisher: William Andrew
ISBN: 1437735215
Category : Science
Languages : en
Pages : 369

View

Book Description
The ability to mix minute quantities of fluids is critical in a range of recent and emerging techniques in engineering, chemistry and life sciences, with applications as diverse as inkjet printing, pharmaceutical manufacturing, specialty and hazardous chemical manufacturing, DNA analysis and disease diagnosis.The multidisciplinary nature of this field – intersecting engineering, physics, chemistry, biology, microtechnology and biotechnology – means that the community of engineers and scientists now engaged in developing microfluidic devices has entered the field from a variety of different backgrounds.Micromixers is uniquely comprehensive, in that it deals not only with the problems that are directly related to fluidics as a discipline (aspects such as mass transport, molecular diffusion, electrokinetic phenomena, flow instabilities, etc.) but also with the practical issues of fabricating micomixers and building them into microsystems and lab-on-chip assemblies.With practical applications to the design of systems vital in modern communications, medicine and industry this book has already established itself as a key reference in an emerging and important field.The 2e includes coverage of a broader range of fabrication techniques, additional examples of fully realized devices for each type of micromixer and a substantially extended section on industrial applications, including recent and emerging applications. - Introduces the design and applications of micromixers for a broad audience across chemical engineering, electronics and the life sciences, and applications as diverse as lab-on-a-chip, ink jet printing, pharmaceutical manufacturing and DNA analysis - Helps engineers and scientists to unlock the potential of micromixers by explaining both the scientific (microfluidics) aspects and the engineering involved in building and using successful microscale systems and devices with micromixers - The author's applied approach combines experience-based discussion of the challenges and pitfalls of using micromixers, with proposals for how to overcome them

Author: Jun Zeng
Publisher: Springer Science & Business Media
ISBN: 1402051239
Category : Technology & Engineering
Languages : en
Pages : 407

View

Book Description
Design Automation Methods and Tools for Microfluidics-Based Biochips deals with all aspects of design automation for microfluidics-based biochips. Experts have contributed chapters on many aspects of biochip design automation. Topics covered include: device modeling; adaptation of bioassays for on-chip implementations; numerical methods and simulation tools; architectural synthesis, scheduling and binding of assay operations; physical design and module placement; fault modeling and testing; and reconfiguration methods.