Conventional and Pendeo-epitaxial Growth of III-nitride Thin Films by Molecular Beam and Metalorganic Vapor Phase Techniques

Conventional and Pendeo-epitaxial Growth of III-nitride Thin Films by Molecular Beam and Metalorganic Vapor Phase Techniques PDF Author: Kevin James Linthicum
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 366

Book Description


Metalorganic Vapor Phase Epitaxy (MOVPE)

Metalorganic Vapor Phase Epitaxy (MOVPE) PDF Author: Stuart Irvine
Publisher: John Wiley & Sons
ISBN: 1119313015
Category : Technology & Engineering
Languages : en
Pages : 582

Book Description
Systematically discusses the growth method, material properties, and applications for key semiconductor materials MOVPE is a chemical vapor deposition technique that produces single or polycrystalline thin films. As one of the key epitaxial growth technologies, it produces layers that form the basis of many optoelectronic components including mobile phone components (GaAs), semiconductor lasers and LEDs (III-Vs, nitrides), optical communications (oxides), infrared detectors, photovoltaics (II-IV materials), etc. Featuring contributions by an international group of academics and industrialists, this book looks at the fundamentals of MOVPE and the key areas of equipment/safety, precursor chemicals, and growth monitoring. It covers the most important materials from III-V and II-VI compounds to quantum dots and nanowires, including sulfides and selenides and oxides/ceramics. Sections in every chapter of Metalorganic Vapor Phase Epitaxy (MOVPE): Growth, Materials Properties and Applications cover the growth of the particular materials system, the properties of the resultant material, and its applications. The book offers information on arsenides, phosphides, and antimonides; nitrides; lattice-mismatched growth; CdTe, MCT (mercury cadmium telluride); ZnO and related materials; equipment and safety; and more. It also offers a chapter that looks at the future of the technique. Covers, in order, the growth method, material properties, and applications for each material Includes chapters on the fundamentals of MOVPE and the key areas of equipment/safety, precursor chemicals, and growth monitoring Looks at important materials such as III-V and II-VI compounds, quantum dots, and nanowires Provides topical and wide-ranging coverage from well-known authors in the field Part of the Materials for Electronic and Optoelectronic Applications series Metalorganic Vapor Phase Epitaxy (MOVPE): Growth, Materials Properties and Applications is an excellent book for graduate students, researchers in academia and industry, as well as specialist courses at undergraduate/postgraduate level in the area of epitaxial growth (MOVPE/ MOCVD/ MBE).

Lateral Epitaxial Growth Techniques for Gallium Nitride Thin Films on 6H-silicon Carbide (0001) Substrates Via Metalorganic Vapor Phase Epitaxy

Lateral Epitaxial Growth Techniques for Gallium Nitride Thin Films on 6H-silicon Carbide (0001) Substrates Via Metalorganic Vapor Phase Epitaxy PDF Author: Darren Brent Thomson
Publisher:
ISBN:
Category : Epitaxy
Languages : en
Pages : 226

Book Description


Study of III -Nitrides Heterostructures Grown by Molecular Beam Epitaxy

Study of III -Nitrides Heterostructures Grown by Molecular Beam Epitaxy PDF Author: Che Woei Chin
Publisher: LAP Lambert Academic Publishing
ISBN: 9783844392678
Category :
Languages : en
Pages : 124

Book Description
Various techniques have been used to grow III-nitride heterostructures including metalorganic vapor deposition, hydride vapor epitaxy and molecular beam epitaxy (MBE). Among these techniques, MBE presents a number of advantages such as precise control of layer thickness and composition. MBE is a highly sophisticated system which thin film quality is sensitive to the growth parameters. From the literature, a systematic growth procedure has not been well-documented. This book presents an in depth understanding of MBE growth mechanism which is essential for thin film quality improvement. Detailed study on the growth mechanism allows the acquisition of the fundamental knowledge in growing precise optoelectronics device structures. This book focuses on the study of III-nitride thin films grown by MBE on various aspects, supported by analysis using a variety of structural and optical characterization techniques. The book starts with the introduction of the MBE architecture, follows by the detailed growth procedures. The characterization and analysis of various III-nitride thin films grown on Si and sapphire will be presented in the last part of the book.

Growths of III-V Nitride Semiconductors with the Techniques of Metalorganic Vapor Phase Deposition and Molecular Beam Epitaxy

Growths of III-V Nitride Semiconductors with the Techniques of Metalorganic Vapor Phase Deposition and Molecular Beam Epitaxy PDF Author: 黃政傑
Publisher:
ISBN:
Category :
Languages : en
Pages :

Book Description


Organometallic Vapor-Phase Epitaxy

Organometallic Vapor-Phase Epitaxy PDF Author: Gerald B. Stringfellow
Publisher: Elsevier
ISBN: 0323139175
Category : Science
Languages : en
Pages : 417

Book Description
Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the semiconductor industry, this book provides a basic foundation for understanding the technique and the application of OMVPE for the growth of both III-V and II-VI semiconductor materials and the special structures required for device applications. In addition, a comprehensive summary detailing the OMVPE results observed to date in a wide range of III-V and II-VI semiconductors is provided. This includes a comparison of results obtained through the use of other epitaxial techniques such as molecular beam epitaxy (MBE), liquid-phase epitaxy (LPE), and vapor phase epitaxy using halide transport.

Metal Organic Vapour Phase Epitaxy for the Growth of III-V Semiconductor Structures

Metal Organic Vapour Phase Epitaxy for the Growth of III-V Semiconductor Structures PDF Author: Maarten Reinier Leys
Publisher:
ISBN:
Category : Crystal growth
Languages : en
Pages : 172

Book Description


Growth of III-nitride Thin Films and Heterostructures by Gas-source Molecular Beam Epitaxy

Growth of III-nitride Thin Films and Heterostructures by Gas-source Molecular Beam Epitaxy PDF Author: Li-Kang Li
Publisher:
ISBN:
Category :
Languages : en
Pages : 220

Book Description


Study of III-nitride Growth Kinetics by Molecular-beam Epitaxy

Study of III-nitride Growth Kinetics by Molecular-beam Epitaxy PDF Author: Michael William Moseley
Publisher:
ISBN:
Category : Molecular beam epitaxy
Languages : en
Pages :

Book Description
Since the initial breakthroughs in structural quality and p-type conductivity in GaN during the late 1980s, the group-III nitride material system has attracted an enormous amount of interest because of its properties and applications in both electronics and optoelectronics. Although blue light-emitting diodes have been commercialized based on this success, much less progress has been made in ultraviolet emitters, green emitters, and photovoltaics. This lack of development has been attributed to insufficient structural and electrical material quality, which is directly linked to the growth of the material. The objective of this work is to expand the understanding of III-nitride growth towards the improvement of current device capabilities and the facilitation of novel device designs. :Group-III nitride thin films are grown by molecular-beam epitaxy in a pulsed, metal-rich environment. The growths of nitride binaries and ternaries are observed in situ by transient reflection high-energy electron diffraction (RHEED) intensities, which respond to the behavior of atoms on the growing surface. By analyzing and interpreting these RHEED signatures, a comprehensive understanding of nitride thin film growth is obtained. :The growth kinetics of unintentionally doped GaN by metal-rich MBE are elucidated, and a novel method of in situ growth rate measurement is discovered. This technique is expanded to InN, highlighting the similarity in molecular-beam epitaxy growth kinetics between III-nitride binaries. The growth of Mg-doped GaN is then explored to increase Mg incorporation and electrical activation. The growth of InxGa1-xN alloys are investigated with the goal of eliminating phase separation, which enables single-phase material for use in photovoltaics. Finally, the growth of unintentionally doped and Mg-doped AlGaN is investigated towards higher efficiency light emitting diodes. :These advancements in the understanding of III-nitride growth will address several critical problems and enable devices relying on consistent growth in production, single-phase material, and practical hole concentrations in materials with high carrier activation energies.

American Doctoral Dissertations

American Doctoral Dissertations PDF Author:
Publisher:
ISBN:
Category : Dissertation abstracts
Languages : en
Pages : 816

Book Description