Author: Yongwoong BaePublisher:
ISBN:
Category :
Languages : en
Pages :
Book Description
Chemical Vapor Deposition of Silicon-based Dielectric Thin Films and in Situ Laser-diode Infrared Absorption Spectroscopy of Gas Phase
Author: Yongwoong BaeFundamental Gas-phase and Surface Chemistry of Vapor-phase Deposition II and Process Control, Diagnostics and Modeling in Semiconductor Manufacturing IV
Author: Electrochemical Society. High Temperature Materials DivisionPublisher: The Electrochemical Society
ISBN: 9781566773195
Category : Science
Languages : en
Pages : 526
Book Description
In Situ Infrared Reflection Absorption Spectroscopic Characterization of Plasma Enhanced Chemical Vapor Deposited SiO2 Films
Author: K. B. KollerPublisher:
ISBN:
Category :
Languages : en
Pages : 32
Book Description
The sensitivity and selectivity of double modulation Fourier Transform Infrared Reflection Absorption Spectroscopy for absorbing species on a reflecting surface has been employed for the in situ analysis of low temperature Plasma Enhanced Chemical Vapor Deposition formed SiO2 films deposited on HgCdTe, Silicon, and Aluminum substrates. An oblique angle of incidence of ca. 55 was chosen to yield maximum sensitivity for the longitudinal optical phonon model of SiO2 on Si. The peak frequency and shape of the LO mode absorption band varied with the quality of the SiO2 films thus providing a means of in situ assessment of reaction conditions at any stage of film growth. This diagnostic technique can be readily applied to the in situ analysis of dielectric thin films formed under a variety of reaction conditions. Silicon dioxide. (MJM).
Handbook of Thin Film Deposition
Author: Krishna SeshanPublisher: William Andrew
ISBN: 1437778747
Category : Technology & Engineering
Languages : en
Pages : 411
Book Description
The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned ‘Moore’s Law’ relating to the technology development cycle in the semiconductor industry
Silicon Nitride and Silicon Dioxide Thin Insulating Films
Author: Dissertation Abstracts International
Author: Publisher:
ISBN:
Category : Dissertations, Academic
Languages : en
Pages : 874
Book Description
Plasma Deposition of Amorphous Silicon-Based Materials
Author: Pio CapezzutoPublisher: Elsevier
ISBN: 0080539106
Category : Science
Languages : en
Pages : 339
Book Description
Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced. Focuses on the plasma chemistry of amorphous silicon-based materials Links fundamental growth kinetics with the resulting semiconductor film properties and performance of electronic devices produced Features an international group of contributors Provides the first comprehensive coverage of the subject, from deposition technology to materials characterization to applications and implementation in state-of-the-art devices
Aqueous-derived Thin Films and Their Interfacial Interactions with Semiconductor Surfaces
Author: Milana Cherie ThomasPublisher:
ISBN:
Category : Aluminum oxide
Languages : en
Pages :
Book Description
Metal oxide systems are well known for their high dielectric constants, which are important for advanced microelectronics applications. The microelectronics industry currently employs vacuum-based techniques, such as chemical vapor deposition (CVD), to deposit metal oxide films. These vapor-phase deposition techniques suffer due to their slow deposition rates and their use of expensive equipment. Additionally, these processes sometimes require the use of harmful source gases and/or generate corrosive by-products. On the other hand, solution-processed thin films fabricated by spin-coating are advantageous because the process is simple, low cost, and scalable. Aqueous solution deposition is particularly attractive because it offers a green alternative to vapor-phase deposition and has been shown to produce uniform thin films by spin coating on hydrophilic silicon surfaces. However, it has been shown that silicon's native oxide can degrade device performance due to its electronic interfacial states. In addition, aqueousderived thin films suffer from poor electrical performance due to mobile water and hydroxyl protons, often requiring very high temperature anneals to mitigate. Such anneals compromise the interface between the film and the silicon substrate, hence the electrical performance. One effective method to control the interface, and thus improve device performance, is to functionalize the semiconductor surface using wet chemistry. Here, we address the concerns of aqueous thin film deposition and present a method for alleviating the issues associated with current silicon-silicon oxide devices. We use wet chemical functionalization to graft selfassembled monolayers (SAMs) onto oxide-free silicon, then spin-coat an aqueous thin film on top of the SAM layer. The chemical stability of the SAM and the changes that occur at the interfaces between the Si/SAM/film stack during film deposition and dehydration are monitored by in situ Fourier transform infrared spectroscopy (FTIR) and ex situ X-ray photoelectron spectroscopy (XPS). The modification of the Si/SAM interface is studied as a function of annealing temperature, with electrical measurements used as a metric to quantify the effectiveness of the SAM layer to alleviate issues of interfacial defects observed for films on silicon oxide. The results are presented in three parts: (1) a dehydration study of aqueous-derived thin films deposited on silicon oxide, (2) the synthesis of a novel SAM interfacial layer tailored to accommodate aqueous, Al-based precursors and (3) a study to quantify the effectiveness, if any, on the SAM interfacial layer through electrical characterization methods. In the first part, we investigate the mechanism for dehydration of aqueous thin films and present a method to enhance the removal of water from the films. Using in situ FTIR, we find that the addition of a protective capping layer can enhance the dehydration of the thin film and prevent water reabsorption for a period of up to 14 days. In the second part, we present hydrosilylation methods to graft SAMs onto oxide-free silicon surfaces. The results show that it is possible to covalently attach the SAMs to silicon, evidenced by the formation of Si-C (detected by XPS) at the interface between the Si and the SAM. Four phosphonic acid-terminated SAMs are prepared and contact angle measurements are used as a metric for evaluating which can best accommodate aqueous spin-coater solutions. To conclude, we investigate the interface between the SAM layer and an aluminum-based thin film derived from aqueous precursor solutions. Current-voltage and capacitance-voltage measurements are used to quantify the effectiveness of the SAM layer.
Atomic Hydrogen Assisted Chemical Vapor Deposition and Etching of Silicon Thin Films
Author: Shuangying YuChemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies
Author: Y. PauleauPublisher: Springer Science & Business Media
ISBN: 9781402005244
Category : Science
Languages : en
Pages : 392
Book Description
Proceedings of the NATO Advanced Study Institute, held in Kaunas, Lithuania, from 3-14 September 2001