Author: Brett Alexander CrudenPublisher:
ISBN:
Category :
Languages : en
Pages : 315
Book Description
Chemical Vapor Deposition of Fluorocarbon Films for Low Dielectric Constant Interlayer Dielectric Applications
Author: Brett Alexander CrudenPublisher:
ISBN:
Category :
Languages : en
Pages : 315
Book Description
Chemical Vapor Deposition of Fluorocarbon Films for Low Dielectric Constant Thin Film Applications
Author: Kenneth Ka Shun LauLow Dielectric Constant Fluorocarbon Films Containing Silicon by Plasma Enhanced Chemical Vapor Deposition
Author: Yoonyoung JinLow Dielectric Constant SiCOH Thin Films Deposited by Plasma-enhanced Chemical Vapor Deposition and Their Etching Characteristics Using Fluorocarbon-based Plasma
Author: Jacob ComeauxPublisher:
ISBN:
Category : Dielectric films
Languages : en
Pages : 0
Book Description
Low Dielectric Constant Fluorinated Diamond-like Carbon Thin Films by Plasma Enhanced Chemical Vapor Deposition
Author: Jeong Woo YiChemical Vapor Deposition Polymerization
Author: Jeffrey B. FortinPublisher: Springer Science & Business Media
ISBN: 147573901X
Category : Science
Languages : en
Pages : 112
Book Description
Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed. This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.
Low-dielectric Constant Materials-- Synthesis and Applications in Microelectronics
Author: Toh-Ming LuPublisher:
ISBN:
Category : Electric insulators and insulation
Languages : en
Pages : 312
Book Description
Interlayer Dielectrics for Semiconductor Technologies
Author: Shyam P MurakaPublisher: Elsevier
ISBN: 0080521959
Category : Science
Languages : en
Pages : 459
Book Description
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package. * Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume * written by renowned experts in the field * Provides an up-to-date starting point in this young research field.
Dielectric Material Integration for Microelectronics
Author: William D. BrownPublisher: The Electrochemical Society
ISBN: 9781566771979
Category : Technology & Engineering
Languages : en
Pages : 384
Book Description
Chemical Vapor Deposition
Author: Electrochemical Society. High Temperature Materials DivisionPublisher: The Electrochemical Society
ISBN: 9781566771788
Category : Science
Languages : en
Pages : 1686
Book Description