Author: Jay S. MitchellPublisher:
ISBN:
Category :
Languages : en
Pages : 254
Book Description
Characterization of Mechanical Properties of Cubic Silicon Carbide Thin Films Deposited Onto Silicon
Author: Jay S. MitchellMechanical Properties of Silicon Carbide (SiC) Thin Films
Author: Jayadeep Deva ReddyMechanical Characterization of Polycrystalline 3C Silicon Carbide Thin Films
Author: Sharvani NagappaAmorphous Silicon Carbide Thin Films
Author: Mariana Amorim FragaPublisher:
ISBN: 9781613247747
Category : Amorphous semiconductors
Languages : en
Pages : 0
Book Description
Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterisation and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.
Epitaxial Growth and Optoelectronic Characterization of Cubic Silicon Carbide Deposited Using Chemical Vapor Deposition on Porous Silicon
Author: Frederick Paul VaccaroPublisher:
ISBN:
Category :
Languages : en
Pages : 406
Book Description
ABSTRACT: Cubic silicon carbide is a promising material for applications in high-power, high-frequency, high-temperature, and high-speed electronic devices. Fourier Transform Infrared Spectroscopy (FTIR), Secondary Ion Mass Spectrometry (SIMS), X-Ray Diffraction (XRD) and Atomic Force Microscopy (AFM) evaluations performed on thin films grown heteroepitaxially on porous (i.e. anodized) silicon using a new chemical vapor deposition (CVD) method employing trimethylsilane confirmed that the thin films were stoichiometric, cubic silicon carbide (3C-SiC). Conclusions were drawn on the basis of comparisons with published standards as well as with results generated on reference materials. SIMS profiles revealed the growth rates at approximately 1150̊C to vary from 2.1 to 4.0 Å/min. depending upon the slight variations in the CVD process trimethylsilane gas pressure. AFM evaluations revealed that the deposition mode at short deposition times was homo-oriented island nucleation and growth but that the 3C-SiC thin films evolved into continuous terraced layers at longer deposition times. Heterojunction (pn) junction diodes, fabricated from CVD and chemical vapor converted (CVC) porous silicon specimens, displayed world record breakdown voltages as high as 140 volts and 150 volts respectively. Historically, heterojunction (pn) junction diodes fabricated from 3C-SiC thin film specimens deposited on non-anodized displayed breakdown voltages below 10 to 20 volts.
Scientific and Technical Aerospace Reports
Author: Growth and Characterization of Silicon Carbide Thin Films and Nanowires
Author: Lunet Estefany LunaPublisher:
ISBN:
Category :
Languages : en
Pages : 109
Book Description
Silicon carbide (SiC) based electronics and sensors hold promise for pushing past the limits of current technology to achieve small, durable devices that can function in high-temperature, high-voltage, corrosive, and biological environments. SiC is an ideal material for such conditions due to its high mechanical strength, excellent chemical stability, and its biocompatibility. Consequently, SiC thin films and nanowires have attracted interest in applications such as micro- and nano-electromechanical systems, biological sensors, field emission cathodes, and energy storage devices. In terms of high-temperature microdevices, maintaining low-resistance electrical contact between metal and SiC remains a challenge. Although SiC itself maintains structural and electrical stability at high temperatures, the metallization schemes on SiC can suffer from silicide formation and oxidation when exposed to air. The second chapter presents efforts to develop stable metallization schemes to SiC. A stack consisting of Ni-induced solid-state graphitization of SiC and an atomic layer deposited layer of alumina is shown to yield low contact resistivity of Pt/Ti to polycrystalline n-type 3C-SiC films that is stable in air at 450 oC for 500 hours. The subsequent chapters focus on the growth and structural characterization of SiC nanowires. In addition to its structural stability in harsh-environments, there is interest in controlling SiC crystal structure or polytype formation. Over 200 different polytypes have been reported for SiC, with the most common being 3C, 4H, and 2H. In terms of SiC nanowire growth, the 3C or cubic phase is the most prevalent. However, as the stacking fault energy for SiC is on the order of a few meV, it is common to have a high density of stacking faults within a given SiC crystal structure. Thus, to enable reliable performance of SiC nanowires, a growth method that can promote a specific polytype or reduce stacking faults is of importance. Ni-catalyzed chemical vapor deposition method is employed for the growth of the nanowires. The effects of substrate structure and quality as well as the various growth parameters such as temperature, pressure, and post-deposition annealing are investigated. Most significant has been the growth and characterization of vertically aligned hexagonal phase (or 4H-like) SiC nanowires grown on commercially available 4H-SiC (0001). The studies presented in this thesis tackle issues in SiC metallization and nanowire growth in efforts to expand the versatility of SiC as a material platform for novel devices.
Silicon Carbide
Author: Wolfgang J. ChoykePublisher: Springer Science & Business Media
ISBN: 3642188702
Category : Technology & Engineering
Languages : en
Pages : 911
Book Description
Since the 1997 publication of "Silicon Carbide - A Review of Fundamental Questions and Applications to Current Device Technology" edited by Choyke, et al., there has been impressive progress in both the fundamental and developmental aspects of the SiC field. So there is a growing need to update the scientific community on the important events in research and development since then. The editors have again gathered an outstanding team of the world's leading SiC researchers and design engineers to write on the most recent developments in SiC.
Mechanical Properties and Microstructural Characterization of Polycrystalline Silicon Thin Films
Author: Swaminathan JayaramanPublisher:
ISBN:
Category :
Languages : en
Pages : 170
Book Description
Novel Carbon Materials and Composites
Author: Xin JiangPublisher: John Wiley & Sons
ISBN: 1119313392
Category : Technology & Engineering
Languages : en
Pages : 300
Book Description
Connects knowledge about synthesis, properties, and applications of novel carbon materials and carbon-based composites This book provides readers with new knowledge on the synthesis, properties, and applications of novel carbon materials and carbon-based composites, including thin films of silicon carbide, carbon nitrite, and their related composites. It examines the direct bottom-up synthesis of the carbon-based composite systems and their potential applications, and discusses the growth mechanism of the composite structures. It features applications that range from mechanical, electronic, chemical, biochemical, medical, and environmental to functional devices. Novel Carbon Materials and Composites: Synthesis, Properties and Applications covers an overview of the synthesis, properties, and applications of novel carbon materials and composites. Especially, it covers everything from chemical vapor deposition of silicon carbide films and their electrochemical applications to applications of various novel carbon materials for the construction of supercapacitors to chemical vapor deposition of diamond/silicon carbide composite films to the covering and fabrication processes of nanodot composites. Looks at the recent progress and achievements in the fields of novel carbon materials and composites, including thin films of silicon carbide, carbon nitrite, and their related composites Discusses the many applications of carbon materials and composites Focuses on the hot topic of the fabrication of carbon-based composite materials and their abilities to extend the potential applications of carbon materials Published as a title in the new Wiley book series Nanocarbon Chemistry and Interfaces. Novel Carbon Materials and Composites: Synthesis, Properties and Applications is an important book for academic researchers and industrial scientists working in the fabrication and application of carbon materials and carbon-based composite materials and related fields.