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Anomalous and Nonlinear Effects in Inductively Coupled Plasmas

Anomalous and Nonlinear Effects in Inductively Coupled Plasmas PDF Author: Yuriy Olegovich Tyshetskiy
Publisher:
ISBN:
Category :
Languages : en
Pages :

Book Description


Anomalous and Nonlinear Effects in Inductively Coupled Plasmas

Anomalous and Nonlinear Effects in Inductively Coupled Plasmas PDF Author: Yuriy Olegovich Tyshetskiy
Publisher:
ISBN:
Category :
Languages : en
Pages :

Book Description


Anomalous and Nonlinear Effects in Inductively Coupled Plasmas

Anomalous and Nonlinear Effects in Inductively Coupled Plasmas PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :

Book Description
In this thesis the nonlinear effects and heating are studied in inductively coupled plasma (ICP) in a regime of anomalous skin effect (nonlocal regime). In this regime the thermal motion of plasma electrons plays an important role, significantly influencing the processes associated with the penetration of electromagnetic field into plasma, such as the ponderomotive effect and heating of plasma by the field. We have developed a linear kinetic theory that describes the electron dynamics in ICP taking into account the electron thermal motion and collisions of electrons. This theory yields relatively simple expressions for the electron current in plasma, the ponderomotive force, and plasma heating. It describes correctly the thermal reduction of ponderomotive force in the nonlocal regime, which has been previously observed experimentally. It also describes the collisionless heating of plasma due to resonant interaction between the electromagnetic wave and plasma electrons. There is a good overall agreement of the results of our theory with the experimental data on ponderomotive force and plasma heating. Using our theory, we predicted a new effect of reduction of plasma heating compared to the purely collisional value, occurring at low frequencies. This effect has not been previously reported. The nonlinear effects of the electromagnetic field on the electron distribution function and on plasma heating, that are not accounted for in the linear kinetic theory, have been studied using a quasilinear kinetic theory, also developed in this thesis. Within the quasilinear approximation we have formulated the system of equations describing the slow response of plasma electrons to the fast oscillating electromagnetic field. As an example, these equations have been solved in the simplest case of cold plasma with collisions, and the nonlinear perturbation of the electron distribution function and its effect on the plasma heating have been found. It has been shown that the nonlinear.

Anomalous and Nonlinear Effects in Inductively Coupled Plasmas

Anomalous and Nonlinear Effects in Inductively Coupled Plasmas PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :

Book Description
In this thesis the nonlinear effects and heating are studied in inductively coupled plasma (ICP) in a regime of anomalous skin effect (nonlocal regime). In this regime the thermal motion of plasma electrons plays an important role, significantly influencing the processes associated with the penetration of electromagnetic field into plasma, such as the ponderomotive effect and heating of plasma by the field. We have developed a linear kinetic theory that describes the electron dynamics in ICP taking into account the electron thermal motion and collisions of electrons. This theory yields relatively simple expressions for the electron current in plasma, the ponderomotive force, and plasma heating. It describes correctly the thermal reduction of ponderomotive force in the nonlocal regime, which has been previously observed experimentally. It also describes the collisionless heating of plasma due to resonant interaction between the electromagnetic wave and plasma electrons. There is a good overall agreement of the results of our theory with the experimental data on ponderomotive force and plasma heating. Using our theory, we predicted a new effect of reduction of plasma heating compared to the purely collisional value, occurring at low frequencies. This effect has not been previously reported. The nonlinear effects of the electromagnetic field on the electron distribution function and on plasma heating, that are not accounted for in the linear kinetic theory, have been studied using a quasilinear kinetic theory, also developed in this thesis. Within the quasilinear approximation we have formulated the system of equations describing the slow response of plasma electrons to the fast oscillating electromagnetic field. As an example, these equations have been solved in the simplest case of cold plasma with collisions, and the nonlinear perturbation of the electron distribution function and its effect on the plasma heating have been found. It has been shown that the nonlinear.

Nonlinear Effects in Low Frequency Inductive Plasmas

Nonlinear Effects in Low Frequency Inductive Plasmas PDF Author: A. I. Smolyakov
Publisher:
ISBN:
Category :
Languages : en
Pages : 2

Book Description
Modern inductively coupled plasma (ICP) sources tend to operate at low frequencies (several MHz and less) that reduces capacitive coupling and transmission line effects and leads to simpler and lower cost rf power sources and matching circuits. Together with a low neutral gas pressure (1-10 mTorr) this creates a unique combination of conditions where two features of inductively coupled plasmas become most prominent: anomalous (non-collisional) heating and nonlinearity due to the Lorentz force. When the electrons are weakly collisional, the collisionless wave particle interaction (Landau damping) replaces real collisions and becomes the main mechanism of the wave absorption and plasma heating 1. In this regime, the electron mean free path exceeds the characteristic plasma length scale so that electrons "sample" the electric field over large distance resulting in the electric current being not a local function of the electric field. This regime is often referred to as nonlocal regime as opposite to the local, or short mean free path, highly collisional regime of the classical skin effect. The related property of the low frequency ICP is due to the fact that the nonlinear Lorentz force can be much larger than the force of the inductive electric field REGIME OF THE ELECTRON Hall magnetohydrodynamics (EMHD). Nonlinear forces in ICP may significantly affect plasma density profile 2, generate higher harmonics of the electric current 3, electrostatic potential 4,5, and modify the skin-effect 6. In this paper we review the experimental data and theoretical models describing these effects.

Nonlinear Dynamics

Nonlinear Dynamics PDF Author: Rowena Ball
Publisher: World Scientific
ISBN: 9812383204
Category : Mathematics
Languages : en
Pages : 451

Book Description
This book is an inspirational introduction to modern research directions and scholarship in nonlinear dynamics, and will also be a valuable reference for researchers in the field. With the scholarly level aimed at the beginning graduate student, the book will have broad appeal to those with an undergraduate background in mathematical or physical sciences. In addition to pedagogical and new material, each chapter reviews the current state of the area and discusses classic and open problems in engaging, surprisingly non-technical ways. The contributors are Brian Davies (bifurcations in maps), Nalini Joshi (integrable systems and asymptotics), Alan Newell (wave turbulence and pattern formation), Mark Ablowitz (nonlinear waves), Carl Weiss (spatial solitons), Cathy Holmes (Hamiltonian systems), Tony Roberts (dissipative fluid mechanics), Jorgen Frederiksen (two-dimensional turbulence), and Mike Lieberman (Fermi acceleration).

Dissertation Abstracts International

Dissertation Abstracts International PDF Author:
Publisher:
ISBN:
Category : Dissertations, Academic
Languages : en
Pages : 1006

Book Description


Particle-In-cell Simulations of Nonlocal and Nonlinear Effects in Inductively Coupled Plasmas

Particle-In-cell Simulations of Nonlocal and Nonlinear Effects in Inductively Coupled Plasmas PDF Author:
Publisher:
ISBN:
Category :
Languages : en
Pages :

Book Description


Plasma Science and Technology

Plasma Science and Technology PDF Author: Haikel Jelassi
Publisher: BoD – Books on Demand
ISBN: 1789852390
Category : Science
Languages : en
Pages : 330

Book Description
Usually called the "fourth state of matter," plasmas make up more than 99% of known material. In usual terminology, this term generally refers to partially or totally ionized gas and covers a large number of topics with very different characteristics and behaviors. Over the last few decades, the physics and engineering of plasmas was experiencing a renewed interest, essentially born of a series of important applications such as thin-layer deposition, surface treatment, isotopic separation, integrated circuit etchings, medicine, etc. Plasma Science

Proceedings

Proceedings PDF Author: Toshio Goto
Publisher:
ISBN: 9784990091507
Category : Electric discharges through gases
Languages : en
Pages : 418

Book Description


Revisiting the Anomalous Rf Field Penetration Into a Warm Plasma

Revisiting the Anomalous Rf Field Penetration Into a Warm Plasma PDF Author: Igor D. Kaganovich
Publisher:
ISBN:
Category :
Languages : en
Pages : 50

Book Description