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Author: Albert V. Ferris-Prabhu Publisher: Artech House Materials Science ISBN: Category : Technology & Engineering Languages : en Pages : 112
Book Description
This text, the first of its kind, delivers a systematically organized introduction to the theory and practice of yield prediction. The book addresses the economic need for accurate yield prediction, and clarifies the important role it plays in the semiconductor industry.
Author: Udo W. Pohl Publisher: Springer Science & Business Media ISBN: 3642329705 Category : Technology & Engineering Languages : en Pages : 335
Book Description
Introduction to Epitaxy provides the essential information for a comprehensive upper-level graduate course treating the crystalline growth of semiconductor heterostructures. Heteroepitaxy represents the basis of advanced electronic and optoelectronic devices today and is considered one of the top fields in materials research. The book covers the structural and electronic properties of strained epitaxial layers, the thermodynamics and kinetics of layer growth, and the description of the major growth techniques metalorganic vapor phase epitaxy, molecular beam epitaxy and liquid phase epitaxy. Cubic semiconductors, strain relaxation by misfit dislocations, strain and confinement effects on electronic states, surface structures and processes during nucleation and growth are treated in detail. The Introduction to Epitaxy requires only little knowledge on solid-state physics. Students of natural sciences, materials science and electrical engineering as well as their lecturers benefit from elementary introductions to theory and practice of epitaxial growth, supported by pertinent references and over 200 detailed illustrations.
Author: A. J. van de Goor Publisher: John Wiley & Sons ISBN: Category : Technology & Engineering Languages : en Pages : 542
Book Description
Comprehensive coverage of memory test problems at chip, array and board level is provided in this book. For each of these test levels a class of fault models is introduced along with tests for these models. The author also presents algorithms of relevant fault models, together with proofs of their correctness. Special attention is given to why a fault model belongs to a particular class and why it is of interest. A software package, suitable for use on IBM PCs and compatibles, is also available which consists of a set of memory test programs and a simulation package demonstrating how the algorithms are executed and the relationship of the algorithm with the memory
Author: Gary S. May Publisher: John Wiley & Sons ISBN: 0471790273 Category : Technology & Engineering Languages : en Pages : 428
Book Description
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.